IC697CPX782 IC697CPX782 IC697CPX782 IC697CPX782  

由模块联结成系统有三种方法：

①无底板，靠模块间接口直接相联，然后再固定到相应导轨上。德维森公司的V80系列PLC就是这种结构，比较紧凑。

②有底板，所有模块都固定在底板上。如德维森公司的PPC11、PPC22和PPC31系列PLC，OMRON公司的C200Ha机，CV2000等中、大型机就是这种结构。它比较牢固，但底板的槽数是固定的，如3、5、8、10槽等等。槽数与实际的模块数不一定相等，配置时难免有空槽。这既浪费，又多占空间，还得占空单元把多余的槽作*。

③用机架代替底板，所有模块都固定在机架上。这种结构比底板式的复杂，但更牢靠。一些特大型的PLC用的多为这种结构。

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郑娟萍

厦门仲鑫航自动化设备有限公司 

按生产厂家分

目前生产PLC的厂家较多。但能配套生产，大、中、小、微型均能生产的不算太多。较有影响的，在中国市场占有较大份额的公司有：

德国西门子公司：它有S5系列的产品。有S5－95U、100U、115U、135U及155U。135U、155U为大型机，控制点数可达6000多点，模拟量可达300多路。zui近还推出S7系列机，有S7-200（小型）、S7-300（中型）及S7-400机（大型）。性能比S5大有提高。

日本OMRON公司：它有CPM1A型机，P型机，H型机，CQM1、CVM、CV型机，Ha型、F型机等，大、中、小、微均有，特别在中、小、微方面更具特长，在中国及世界市场，都占有相当的份额。

日本三菱公司的PLC也是较早推到我国来的。其小型机F1前期在国内用得很多，后又推出FX2机，性能有很大提高。它的中、大型机为A系列。AIS、AZC、A3A等。

日本日立公司也生产PLC，其E系列为箱体式的。基本箱体有E-20、E-28、E－40、E－64。其I/O点数分别为12/8、16/12、24/16及40/24。另外，还有扩展箱体，规格与主箱体相同其EM系列为模块式的，可在16～160之间组合。

日本东芝公司也生产PLC，其EX小型机及EX－PLUS小型机在国内也用得很多。它的编程语言是梯形图，其的编程器用梯形图语言编程。另外，还有EX100系列模块式PLC，点数较多，也是用梯形图语言编程。

日本松下公司也生产PLC。FP1系列为小型机，结构也是箱体式的，尺寸紧凑。FP3为模块式的，控制规模也较大，工作速度也很快，执行基本指令仅0?l微秒。

日本富士公司也有PLC。其NB系列为箱体式的，小型机。NS系列为模块式。

美国GE公司、日本FANAC合资的GE－FANAC的90－70机也是很吸引人的。据介绍。它具有25个特点。诸如，用软设定代硬设定，结构化编程，多种编程语言，等等。它有914、781／782、771／772、731／732等多种型号。另外，还有中型机90－30系列，其型号有344、331、323、321多种；还有90－20系列小型机，型号为211。

NEW ASYST 9701-4735-01 CABLE, COMPASS COMPONENTS 

Huntington PV-053-00 Valve 

Pittman Lo-Cog 9234E318-R2, 9700-6191-01, 24 VDC, 399676

Precise MR16 Lamp Q50MR16C/FL40 12V 50W 40 Beam

AMAT 0010-02433 Assy, FCW Valve, 300 MM Centura 

Automated Wafer loader, Brooks Robot, ABM-405-1-S-CE-S293 , Aligner PRE-4611

Mitsubishi SD-N21 Magnetic Contactor 

IDEC NRBM3111 Circuit Protector, Breaker, Metron 3104600 CB, 15A, 3 Phase 405546

2 Used Chuck Assembly 6" 01-20-04705-06

ISIOC HCM APVD NOVELLUS 02-276954-00 REV. 1

2 Used Chuck Assembly 6" 01-20-04076-06

TWO Luxtron 100C M-100 Temperature Control 0190-35236

 UNIT UFC-1100A,  SiH4 200 sccm, MFC 1100

New Allenair  E 2x2 1/2 BC RM #310  Air cylinder 

Keyence FS-V11P Optic Sensor,  Novellus 02-147639-02

3 NEW Chemraz 112 Oring, 2-112 chemraz SC513, 22-136505-00

SMC, Pneumatic, 24 Solonoid, Manifold, 24VDC

2 Swagelok Microweld tee fittings 6LV-4MW-3 price for all 2 units

Swagelok 6LV-F1VVDD2DP-AA 3 way valve

2 Parker 4V-CO4L-1/3-V-SS-PP O-Ring Poppet Check Valve

AMAT 0190-05771 LCF sensor interface PCB board

AMAT 0050-70035 WLDMT 2" PANEL TUBE 

LAM 715-140184-8-E1 Wafer holder, 8 inch tightest pocket

Vacuum Tube DN 100-130 

Nordson MPS-610V, Novellus R27-301990-00, Cooling Wave UV Curing System, 400017

Festo Terminal Valve CPV14-GE-MP-8, CPV14-VI-P8 H802, 161361 K102

VME MOTOROLA 2304-900

3 NEW Perlast 22-169086-00 Oring, White perlast G70H-326SC, 30.65 x 5.33

Datalux S107WN Touch Screen Monitor 

Thornton 200CR, Conductivity/Resistivity Meter 396965

Olympus MDPlan 150, 0.95, IC 150, used

SMC SYJ714R-5MOZ manifold assembly, 3 SMC D-A73 reed auto switch, 400316

Novellus 11-145742-00-1 CAL-WELD, cooling hose, connecting fitting Parker 801-8 

YES-RCM3, Yield Engineering System

PFEIFFER Vacuum turbo pump TMU 521 PX, D-35614 Asslar, controller PM C01 711

Todd products SC24-11C, power supply, 115/230VAC 6A/3A with paper work, 

Lot of 4, ALLEN BRADLEY 190-P040 Motor Starter relays

AMAT 0020-44710 Bracket, Filter Retainer, Right

Griswold 4902H Flow Controller 

New AMAT 1270-01110 Ashcroft SW ASSY, DUAL PRESSURE W/XDUC

COMPASS COMPONENTS 13122-01 JOB/ASM/OPER, NEW-192488 cable

AMAT 0020-42256 plate blocker 8 inches 

LAM 715-018611-117 , LOWER, Electrode, 8" CHUCK

AMAT 0140-12729 Harness Pneumatic, 200mm Desica, Dryer Low

ASYST SERVO MOTOR ASSEMBLY 9701-3715-01, ASYST 4003-0464-01

Precise Sensors 3221-100-01-GA-4SF-B4

Mini Circuits Amplifier ZHL-03-5WF-(SMA)

18 VCR 1/2 Inch Gasket with Retainer 4JR-9.52RE-RG-Ni-O 

Norgren SLV-10586-05 pneumatic manifold

Novellus 02-283808 gas manifold assy w Brooks 5866RT MFC He  300 SCCM 

D123466 Shield, Ring, Spacer, SS 

emecanique 2B2-BE102 Key Switch, Lot of 3

8 Sets of AMAT 3700-06063 Centering Ring NW 80, KF80, with Kalrez 9100

OMRON CJ1W-INT01 INPUT UNIT, 24 VDC, CLASS 2 ONLY

SMC SYJ714R-5MOZ manifold assembly, 3 SMC D-A73 reed auto switch, 400315

AMAT 0200-02452 cover ring, Quartz, L-Shape, 32RA, 300 EMAX

Micromanipulator 6000 4" Wafer Probe Station, Bausch and Lomb. with probes

DSC-002 99A5 PCB BOARD

2 LAM 715-011531-011 LRC Electrode 

Manifold lucas KF40 Foreline with valve Varian cold cathode gauge 525, K9234-311

6 NEW HEWLETT PACKARD 15464-69601 , TTL POD, 

6 NEW Fluorosilicone 19.33 x 1.39 Oring, Blue, 70, 22-373624-00

3 NEW Fluorosilicone 22.50 x 1.29 Oring, Blue, 70, 22-373622-00

Novellus 12-01163-00 Ceramic Ring

SMC NP420-DN1 Manifold SERIAL INTERFACE 

20 AMAT 0021-07461 Cap, Lift - Pin Guide, Hi - Temp DXZ 

OMRON INT01,  0D507-18P, INPUT UNIT, 24 VDC

AMAT 0240-99280ITL Kit, MRS shields, Stand off fix

Thermo Neslab Merlin M25 262112032000

Brooks Automation, Assembly, Aligner, 5X 450MM FSE8660, 9701-5492-01

Lam research 715-011531-016 Electrode aluminium anodized degrease.

Ham-Let 2LDS8Q-57358 Manual Valve 

NEW Swagelok Nupro SS-HBV51-CM Bellows valve

Monnier Hot Can N2 Supply with Gauge 1006803

6 SMC VQ2201Y-5 Pneumatic solenoid valves

Leybold-Heraeus Turbotronik NT 450 Turbo Pump Controller 

Hamamatsu C4251 Starter Unit for Continuous Mode Xenon Lamp C4251

2 WATLOW SD TEMPERATURE CONTROLLERS SD6C-HCJA-AAAF

STEC Mass Flow Controller SEC-4400MC 340064

LAM 853-015130-103 RF Match, used

3 New Novellus 02-291754-00 SMC Actuation Cylinder Valv

NEW Proteus Industries 0100B24 Flow Switch, 24V 30mA

Precision Sensor E36W-H50 Absolute Pressure Switch, 60-034022-00

2 NEW Swagelok 3 Port ALD Diaphragm Valve

AMAT 0090-00409 assembly light tower, yellow, green, blue, white, PATLITE SE-D

Ham-LET UCV HM20 4VKLC GF4 150 PSI Shut off Valve

NEW Parker Veriflo Division valve 45800491, 945AOPLPNCSB223VESP

AMAT 0040-35433 Rev. C AFI Chamber Bottom 

NOVELLUS foreline 010-128858-00 with MDC valve and GP 275 mini convectron gauge

AMAT 0010-13104 P5000 Cassette Handler Bottom 08501-07

NEW Parker Veriflo Division valve 45800978-2, SMSQ2MICRO130E60102

New PALL PCF1Y050B08, New Profile II, 5.0um filter cartridge

8 NEW 1/4 inch VCR Gasket Ni VCR, Assy 0240-A2782, installation kit

AMAT 3800-01210 Regulator Unit 131

AMAT 1400-01165 Raytek Thermalert MI 

Schneider Electric LC1DT406BL, emecani TeSys 073546,  LAD4TBDL, TeSys-073546

XP DNR120PS24 115/230VAC 2.8/1.4A 47/63HZ POWER SUPPLY, output 24 VDC 120W

2 Vat gate valve Novellus 02-115275-00, MFG part number F02-60499/0619

PROM DISK 66700301

Integrated Dynamics Engineering 755000-01 Pre-Aligner

CYBOR Module Controller 00506-05, 18 VDC 10.5 AMPS 

2 AMAT 0150-77053 cable assy, PAD cond, control 

MKS CDN396R AS01396-6-5 PCB

Asyst 3200-1251-02 PCB Assy, Door Controller 

LUXTRON 1015 ENDPOINT CONTROLLER NEW IN THE BOX

3 Mouser Electronics 636-180-062-113R911, 62P Male Vt Dip Sol Connector

Mitsubishi Melsec FX0N-60MR Programmable controller

Precision Temperature forcing system T-2420 Thermonics T-2420S7

2 Tescom .20 MPa, 30 PSIG, Manual Diaphragm, 12-1B11TGS2C-030, RT051106A 

6 Mouser Electronics 636-180-015-213R911, 180-015-213R911, 15P Fem Vt Dip Sol

AC Tech SL205S Variable Speed AC motor Drive Lenze group

AMAT 0010-77107 Assy, RR Manifold 

RECIF ANF Automatic Wafer Notch Finder

AMAT 0190-35163 WASSY PCB MCVD CHAMBER INTERFACE 

Iwaki EH Controller EHC-23UPE Metering Pump EHE55FF-23UPE12

AMAT 0140-04810 thermal fluid outlet and return hose with QD fittings

Hub, Keyed, Opto Sensor 7700 Rotation 

SIOC WTS-HV SIOC 0 NOVELLUS 02-123962-00 REV. A

Thermo Electron Neslab Merlin M150 Chiller BOM# 266116042000

4 Phasetronics modules 999800, each with 3 PCBA 307 064-500-204, interlogic 

ISIOC DAMA CLEAN BB-DFE DIGITAL DYNAMICS G19-10000-00

ASYST 3000-1121-01 REV D controller interface PCB, ASSY 3200-1121-02

Trazer AMU10E-2, Novellus 27-10162-00, RF match network, 400644

5 AMAT 3870-01732 Veriflo 944A0PLPNCSFSFEX Valves 

AMAT 0021-20218 Buss Bar Main GND Main AC 300mm

LAM 715-020916-002 Anodized Aluminum Electrode

Veeco 0340-655-01, Auto neutralization controller

1000 Tokyo Electron D124955 Roller, Black 

30 new dump beam, con 44103-00

Fujikin Gas Line Manifold Valve 16.2 MPa 

AMAT 0020-27021 REV PC 1239900-148 

MKS 122A-11061 10 Torr Pressure Transducer Type 122A

TWO LAM RESEARCH 715-011531-001 ELECTRODE ALUMINUM ANODIZED

Anelva 842-5088-2 ILC-1013 Motor Control Module

4 new E17043060 spool lip seal wafer lift

Inficon AG, LI-9496 Balzers, BPG400, Pirani gauge 353-500, S155, Sensor BPG400

AMAT 0040-03930 Blade, Universal Transfer 

USTC Chiller, USTC-5000PC Chiller,  USTC-5000PC and hoses seen 

NEW Tescom 24-2A26AA77-001 Valve

AMAT 0200-40080 clamp, SNNF, JMF, EXC, 200mm, 0200-40080A

New Novellus 03-322451-00 New cable, ESC supply to Seal plate

Novellus cooling hose 11-152327-02 with one connecting fitting 

Metron 483-11984-01 Switch, Pressure, Gas, 1-4PSI, Autoreset 

Swagelok MS-ISK-DP-CM bellows valve indicator switch retrofit kit